SenTec

FMM501A Analog mass flowmeter controller

FMM501A mass series is a direct measurement of gas mass flow using capillary heat sensing technology. There is no need for temperature and pressure correction. Products with high precision and low cost and widely used in different fields.

Category

FMM501A mass flow controller is used for precise measurement and control of the mass flow of gas. They play an important role in scientific research and production in the fields of semiconductor and integrated circuit industry, special materials, chemical industry, industry, medicine, environmental protection and vacuum lamps. Typical applications include: electronic process equipment, such as diffusion, epitaxy, CVD, oxidation, plasma etching, sputtering, ion implantation; and coating equipment, optical fiber melting, micro-reaction device, mixed gas distribution system, capillary measurement Gas chromatograph and other analytical instruments.

Parameters

Range0~2SCCM-200SLM
Accuracy±1% F.S
temperature ±1℃
Linear±0.5% F.S℃
Repeatability0.2% F.S℃
Response time<2s<1s
Analog0-5v/4-20mA
CommunicationRS485 Modbus RTU
Power supply±15V/24V
Working temp0-50℃
Differential pressureDp: 0.05-1.0MPapress drop: <30Kpa
Max pressure3Mpa/10Mpa
Electrical connectionDB15
Leakage rate1×10-8 SCCSHe
Temp C.F±0.015% F.S/℃
Base material316 SST
SealingPTFE/CR/NBR
Fitting1/4″ 3/8″ 6mm 10mm

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