FMM501D Digital mass flowmeter controller

FMM501D mass flow controller is used for precise measurement and control of the mass flow of gas. They play an important role in scientific research and production in the fields of semiconductor and integrated circuit industry, special materials, chemical industry, industry, medicine, environmental protection and vacuum lamps. Typical applications include: electronic process equipment, such as diffusion, epitaxy, CVD, oxidation, plasma etching, sputtering, ion implantation; and coating equipment, optical fiber melting, micro-reaction device, mixed gas distribution system, capillary measurement Gas chromatograph and other analytical instruments.