The development of high temperature pressure sensors plays an important role in guiding the measurement and control work. Common pressure sensors measure temperatures below 200 °C, so they cannot accurately measure pressure at high temperatures. Therefore, many scholars at home and abroad are committed to the research of high temperature pressure sensors. This paper mainly discusses the development status, existing problems and future development trend of high temperature pressure sensor.
Key words
High temperature pressure sensors; Semiconductor materials; Polysilicon; Optical fiber technology.
Brief analysis of the development of high temperature pressure sensors
